发明名称 |
Hermetically sealed silicon micro-machined electromechanical system (MEMS) device having diffused conductors |
摘要 |
The present invention is an apparatus and method for a micro-machined electromechanical system (MEMS) device having a hermetically sealed sensor or actuator device mechanism that is electrically interconnected by diffused conductive paths to a plurality of wire bond pads that are located external to the hermetic seal. |
申请公布号 |
US2003038327(A1) |
申请公布日期 |
2003.02.27 |
申请号 |
US20020226518 |
申请日期 |
2002.08.22 |
申请人 |
HONEYWELL INTERNATIONAL, INC. |
发明人 |
SMITH STEPHEN C. |
分类号 |
B81B7/00;G01P1/02;G01P15/08;(IPC1-7):H01L29/82 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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