Gas sensors and the manufacturing method thereof

摘要

A gas sensor characterized in that the gas sensor has at least: an insulating substrate; a pair of thin film electrodes which are spaced apart at a given interval and provided on the insulating substrate; a thin film gas sensitive layer which is provided on both the substrate and the thin film electrodes, the gas sensitive layer containing a given material as main ingredient; and a pair of thick film electrodes which is correspondingly positioned over the pair of thin film electrodes and provided on the thin film gas sensitive layer, wherein the thin film electrodes and the thick film electrodes are formed so as to sandwich portions of the thin film gas sensitive layer between the two types of electrodes.