申请人 |
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG;BECK, KLAUS;GELLRICH, BERNHARD;HOLDERER, HUBERT;PETASCH, THOMAS;ROESCH, CORNELIA;KOHL, ALEXANDER |
发明人 |
BECK, KLAUS;GELLRICH, BERNHARD;HOLDERER, HUBERT;PETASCH, THOMAS;ROESCH, CORNELIA;KOHL, ALEXANDER |