A microscope for observing a lithographic product where multi-photon entangled light passes through a first lens (Lens 1), a second lens (Lens 2) and impinges on a surface plane (Image) to observe a specimen.
申请公布号
WO02095353(A3)
申请公布日期
2003.02.27
申请号
WO2002US15132
申请日期
2002.05.17
申请人
UNIVERSITY OF MARYLAND, BALTIMORE COUNTY;SHIH, YANHUA;D'ANGELO, MILENA;CHEKHOVA, MARIA