METHOD FOR CONTROLLING LINEAR DIMENSIONS OF SPATIAL OBJECTS

摘要

FIELD: measurement technology. SUBSTANCE: method involves applying structural illumination principle used in three-dimensional computer animation and other applications for recording surface shape. Probing structural illumination is formed on the object surface by illuminating the object under control with optical radiation beam spatially modulated depending on intensity. Probing illumination structure pattern distorted by surface relief of the object under control is recorded. Surface relief height of the object under control is determined by means of computer calculations from probing illumination structure distortion degree. The other two coordinates are calculated from probing illumination structure distortions arrangement on the recorded pattern. Intensity modulation is controlled on two coordinates and spectrum so that structured illumination is formed on the object surface under control, each being different from all others. It enables each relief zone to be coded in relief height and two other coordinates in unique way that enables one to give unambiguous interpretation of areas formed by through openings in object under control when processing the recorded structured illumination pattern by using computer. EFFECT: high accuracy of control. 1 dwg