| 摘要 |
<p>A method of fabricating a phased array narrow band wavelength division multiplexer including an arrayed waveguide (array), a slab waveguide (FPR) and a transition region (TR) between the array waveguide and the slab waveguide comprising etching the transition region with a reactive ion etch to form vertically tapered waveguides between the arrayed waveguides.</p> |
