Microfluid system, used as a microfluid sensor, micropump, microvalve or microfilter e.g. in medicine or in analysis, comprises a inlet/outlet opening in a wafer and a connecting element for the opening

摘要

Microfluid system comprises a inlet/outlet opening (2) in a wafer (3) and a connecting element (1) for the opening. The connecting element covers the surface of the wafer in the region of the opening and has a casing (6) with a protrusion (4). An adhesive bond (8) is provided between the protrusion and the wafer. Preferably the connecting element lies in the region of the opening on the surface of the wafer. The connecting element and the adhesive bond are made from an identical polymer resin, preferably a photocured polymer resin (photopolymer). The wafer is a glass wafer, preferably a borosilicate glass wafer.