发明名称 PROVIDING CURRENT CONTROL OVER WAFER BORNE SEMICONDUCTOR DEVICES USING OVERLAYER PATTERNS
摘要 Disclosed are methods for providing wafer parasitic current control to a semiconductor wafer (1240) having a substrate (1240), at least one active layer (1240) and at least one surface layer (1240), Current control can be achieved through the formation of patterns ( 1240) surrounding contacts (1215), said patterns (1240) including insulating implants and/or sacrificia l layers formed between active devices represented by said contacts (1215). Current flows through active regions (1260) associated with said contacts (1215) and active devices. Methods of and systems for wafer level burn-in (WLBI) of semiconductor devices are also disclosed. Current control at the wafer level is important when using WLBI methods and systems.
申请公布号 CA2457685(A1) 申请公布日期 2003.02.27
申请号 CA20022457685 申请日期 2002.08.12
申请人 HONEYWELL INTERNATIONAL INC. 发明人 GUENTER, JAMES K.;BIARD, JAMES R.;HAWKINS, ROBERT M.;HAJI-SHEIKH, MICHAEL J.
分类号 H01L21/66;G01R31/27;G01R31/28;H01S5/042;H01S5/183;H01S5/42;(IPC1-7):G01R31/27;G01R31/316 主分类号 H01L21/66
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