Temperature control method and semiconductor device manufacturing method

摘要

A temperature control method is provided which is capable of maintaining the accuracy of control based on a detected value of a temperature sensor substantially constant regardless of a change in an error of measurements of the temperature sensor. Measured values of thermocouples 7A, 7B, 7C of a thermocouple thermometer and those of sensor members 6A, 6B, 6C of a radiation thermometer 6 of a sheet-feed apparatus are detected as the processing proceeds. A temperature control parameter of the sheet-feed apparatus is made to change based on differences between the detected temperature values as the processing proceeds.