发明名称 GLASS PLATE HAVING ELECTROCONDUCTIVE FILM FORMED THEREON
摘要 A glass plate with an electroconductive film having a glass plate and, formed thereon in the following order, an undercoat film having a crystalline oxide as a primary component and an electroconductive film having another crystalline oxide as a primary component, characterized in that the glass plate which has been freed of the electroconductive film exhibits a haze value of 0.2 % or more. A film having a crystalline oxide as a primary component constituting the undercoat film is formed by the chemical vapor−phase deposition method using a film forming gas containing steam and having an oxygen concentration of 15 mol % or less. The glass plate with an electroconductive film has a haze value which is enhanced by the utilization of the uneveness of the surface of the undercoat film
申请公布号 WO03017377(A1) 申请公布日期 2003.02.27
申请号 WO2002JP08095 申请日期 2002.08.08
申请人 NIPPON SHEET GLASS CO., LTD.;ICHIKI, KIYOTAKA;KIYOHARA, KOICHIRO;FUJISAWA, AKIRA 发明人 ICHIKI, KIYOTAKA;KIYOHARA, KOICHIRO;FUJISAWA, AKIRA
分类号 C23C16/40;C03C17/34;H01L31/0216;H01L31/0236;H01L31/0392;H01L31/04 主分类号 C23C16/40
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