| 摘要 |
<p>A trapping apparatus traps solid substances converted from reaction products contained in exhaust gases discharged from a process apparatus by a vacuum pump. The trapping apparatus has a trap member for contacting the exhaust gases and trapping reaction products contained in exhaust gases, and a trap housing (1) accommodating the trap member (4) therein. The trap housing has an inlet port (2) for introducing exhaust gases, and an exhaust gas space (3) connected to the inlet port and having an increased cross-sectional area in the direction in which exhaust gases flow in. The trap housing has a flow passage defined therein for passing the exhaust gases in the exhaust gas space and then changing the direction of the exhaust gases so as to flow from the exhaust gas space substantially perpendicularly to the trap member so as to pass the exhaust gases through the trap member while in contact therewith.</p> |
