MECHANICAL RESONATOR DEVICE HAVING PHENOMENA-DEPENDENT ELECTRICAL STIFFNESS

摘要

A mechanical resonator device (10) which has a phenomena-dependent electrica l stiffness is provided. The phenomena may be temperature or acceleration, for example. The device includes a substrate (16) and a resonator (14) supported above the substrate by supports. The device further includes an electrode (1 2) supported above the substrate (16) adjacent the resonator by supports (18) t o obtain an electrode-to-resonator gap wherein electrical stiffness generated across the gap is phenomena-dependent to take instability of resonant frequency of the device caused by the phenomena into consideration.