| 发明名称 |
Article holders with sensors detecting a type of article held by the holder |
| 摘要 |
An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
|
| 申请公布号 |
US2003040837(A1) |
申请公布日期 |
2003.02.27 |
| 申请号 |
US20020265056 |
申请日期 |
2002.10.04 |
| 申请人 |
KRETZ FRANK E.;BERGER ALEXANDER J.;CASAROTTI SEAN A. |
发明人 |
KRETZ FRANK E.;BERGER ALEXANDER J.;CASAROTTI SEAN A. |
| 分类号 |
B25J13/08;B25J19/02;H01L21/00;(IPC1-7):G06F7/00 |
主分类号 |
B25J13/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
