| 摘要 |
A rolling micromirror is disclosed which comprises a micromirror guided in movement by a reference surface. The micromirror is suspended adjacent to the reference surface by a suspension element. An actuator moves the micromirror in relationship with a control signal. The suspension element provides a restoring force that returns the micromirror to an initial position when the actuator applies less than a minimal force to the micromirror. The micromirror optionally includes a stationary or movable pivot point about which the micromirror rotates and tilts. The preferred embodiment is integrated on a single substrate and is a micro-electro-mechanical device.
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