| 摘要 |
<p>Generally, a method and apparatus for supporting a web of polishing material (102). In one embodiment, the apparatus includes a platen (230) and a blocker valve (314). The platen includes a support surface adapted to support the polishing material and a port (284) fluidly coupled to the support surface. A housing that includes a supply port (304) and an exit port (306) has a venturi body (310) disposed therein. The blocker valve has a first state whereby a flow through the housing and blocker valve causes vacuum to be drawn through the port disposed in the platen by the venturi body. In another embodiment, the flow through the venturi (310) may be reversed by changing the state of the blocker valve to blow air through the port (284) disposed in the platen, thereby placing the polishing material and the support surface of the platen in a spaced-apart relation.</p> |
