| 摘要 |
<p>A mechanical resonator device (10) which has a phenomena-dependent electrical stiffness is provided. The phenomena may be temperature or acceleration, for example. The device includes a substrate (16) and a resonator (14) supported above the substrate by supports. The device further includes an electrode (12) supported above the substrate (16) adjacent the resonator by supports (18) to obtain an electrode-to-resonator gap wherein electrical stiffness generated across the gap is phenomena-dependent to take instability of resonant frequency of the device caused by the phenomena into consideration.</p> |
