A robot hand capable of detecting a collision and stopping the robot when the robot hand collides into a peripheral device or the like, and absorbing a collision shock so as to reduce damage which may be caused by the collision. The robot hand (2) includes a base (21) mounted at the end of a robot arm (1) and a pair of support members (22) mounted on the base (21) in parallel to each other so that a large substrate (3) is placed thereon so as to be carried. A hollow body (41) filled with fluid so as to be exapandable/contractable is attached to the end of the support members (22).
