发明名称 DEVICE FOR MANIPULATION OF A COMPOSITE
摘要 The invention relates to a device for manipulation of a composite, made from a substrate holder (1), supporting a substrate (14), which is detachably connected to a frame-like mask holder (2), supporting a mask (13), said substrate (14) being covered by the mask (13) in particular in the contact position. According to the invention, a device may be disclosed by means of which an improved manipulation of a mask composite and in particular a separation of the both holders and/or a turning of the composite from each other is possible, whereby manipulating devices (3, 21), engaging on both sides of the composite (1, 2), which may be displaced relative to each other, are each provided with devices (4, 22, 23) for the fixed retention of one of the both holders.
申请公布号 WO03017332(A1) 申请公布日期 2003.02.27
申请号 WO2002EP05211 申请日期 2002.05.13
申请人 AIXTRON AG;KITTEL, FLORENZ;SCHWAMBERA, MARKUS 发明人 KITTEL, FLORENZ;SCHWAMBERA, MARKUS
分类号 C23C14/04;H01L21/68 主分类号 C23C14/04
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