PNEUMATIC CONTROL SYSTEM AND METHOD FOR SHAPING DEFORMABLE MIRRORS IN LITHOGRAPHIC PROJECTION SYSTEMS

摘要

A system for adjusting a deformable mirror comprising a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures couple on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.