发明名称 A METHOD FOR CONCURRENT FABRICATION OF A DOUBLE POLYSILICON BIPOLAR TRANSISTOR AND A BASE POLYSILICON RESISTOR
摘要 <p>A method for concurrently fabricating a double polysilicon bipolar transistor and a base polysilicon resistor. The method of the present invention constructs a polysilicon resistor in the base polysilicon layer of a salicided double polysilicon integrated circuit process. The overlying emitter polysilicon layer of the bipolar transistor is used to blocksilicidation of the resistor body base polysilicon.</p>
申请公布号 WO2003017340(A2) 申请公布日期 2003.02.27
申请号 IB2002003279 申请日期 2002.08.12
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