发明名称 MICRO-MACHINED ELECTROMECHANICAL SYSTEM (MEMS) ACCELEROMETER DEVICE HAVING ARCUATELY SHAPED FLEXURES
摘要 <p>An apparatus and method for suspending a movable structure form a support structure wherein first and second flat and thin arcuately shaped flexures are formed having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being structured for connection between a support structure and a movable structure to be suspended from the support structure and being aligned along a common axis of rotation between the support structure and the movable structure. Two half-circular flexures may be arranged to form a circular shape or may be interconnected in their middle region to form a single x-shaped suspension member.</p>
申请公布号 WO2003016919(A1) 申请公布日期 2003.02.27
申请号 US2002026440 申请日期 2002.08.20
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