| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge regulator which is low in a cost without being accompanied by upsizing and is capable of regulating a flow rate with high reliability and a processing equipment using this discharge regulator. SOLUTION: The discharge regulator A has a plurality of orifices 1a to 1f which have different calibers, respectively are previously grasped flow rates and are respectively opened and closed by opening/closing members 2a to 2f, primary piping 3 which is connected to the respective orifices 1a to 1f and supplies the gases regulated to a prescribed pressure and secondary piping 4 which is connected to the respective orifices 1a to 1f and aggregates the gas past the opened orifices. One or a plurality of the orifices 1a to 1f are selected and the corresponding opening/closing members 2a to 2f are opened so as to satisfy the previously assigned flow rates. |
