摘要 |
PROBLEM TO BE SOLVED: To obtain a barium titanate film made in a thin film and having a high relative dielectric constant. SOLUTION: A titanium oxide film 3 is formed on a conductor 1 by an electrophoretic method in an organic solvent by using titanium oxide powder, and a barium compound film 4 is formed on the titanium oxide film 3 by an electrophoretic method by using a barium compound in an organic solvent in which an organic acid is dissolved. Then, the titanium oxide film 3 and the barium compound film 4 are heat treated to obtain a barium titanate film 5. |