SYSTEM AND METHOD FOR DISTRIBUTING A RESIN DISPOSED BETWEEN A TOP SUBSTRATE AND A BOTTOM SUBSTRATE

摘要

A system and method for distributing a resin (8) disposed between a top substrate (6) and a bottom substrate. Each substrate (6) has a center hole, and the top and bottom substrates and the resin define an interior region. A top substrate assembly (1436) forms a seal over the center hole of the top substrate and creates a vacuum at the interior region. A bottom substrate assembly receives the top and bottom substrates with the resin disposed in-between. A spinning assembly causes the top and bottom substrates to spin according to a predetermined spin profile.