MANUFACTURING METHOD FOR MICROMIRROR ELEMENT AND THE MICROMIRROR ELEMENT MANUFACTURED BY THE SAME

摘要

PURPOSE: To provide a manufacturing method for a micromirror element which has a thin torsion bar having high-precision thickness while accurately positioned in the thickness-directional middle of a material substrate, and to provide the micromirror element which is manufactured by the method. CONSTITUTION: To manufacture the micromirror element which has a mirror formation part, a frame part, and the torsion bar by using the material substrate having a laminate structure including silicon layers 209 and 21 and at least one intermediate layer 160, a stage for forming a pre-torsion-bar T' which is thinner than the mirror formation part and in contact with the intermediate layer by etching the silicon layer 20 and a stage for forming the torsion bar T by removing the intermediate layer 160 which is in contact with the pre- torsion-bar T' are carried out.