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发明名称
METHOD AND DEVICE FOR GENERATING EUV RADIATION
摘要
申请公布号
EP1285560(A1)
申请公布日期
2003.02.26
申请号
EP20020730003
申请日期
2002.03.13
申请人
LZH LASERZENTRUM HANNOVER E.V.
发明人
CHICHKOV, BORIS;EGBERT, ANDRE
分类号
H05G2/00;(IPC1-7):H05G2/00
主分类号
H05G2/00
代理机构
代理人
主权项
地址
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