| 摘要 |
PROBLEM TO BE SOLVED: To provide a photodetector inspection device capable of shortening the inspection time by eliminating unnecessary inspection time for photodetector group where a plurality of photodetectors are arranged. SOLUTION: When a setting pattern corresponding to visual inspection results is selected and input at a setting part 18, an X-Y table 12 is moved in turn, so that a first and a second photodetectors 16a and 16b come directly below a laser pointer 11, laser light is cast for a specific time and judgment operation is done at an inspection circuit 14 based on an electric potential signal of the potential level caused between probes 17 and 17. Here, the next third photodetector 16c is supposed unnecessary for inspection in the setting pattern, and so the laser pointer 11 stays at stopped state and the X-Y table 12 is moved to the position that the fourth photodetector 16d comes directly below the laser pointer 11.
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