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发明名称
Scanning exposure apparatus and device manufacturing method using the same
摘要
申请公布号
EP0833209(B1)
申请公布日期
2003.02.26
申请号
EP19970307480
申请日期
1997.09.24
申请人
CANON KABUSHIKI KAISHA
发明人
EBINUMA, RYUICHI
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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