发明名称 SOLUTION TREATMENT DEVICE, AND SOLUTION TREATMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide a solution treatment device capable of pressing an electrode and a sealing means against a work with the pressure suitable for the electric conduction and the sealing. SOLUTION: A treatment solution tank comprises a treatment solution tank side part and a treatment solution tank bottom part which are connected to each other in an attachable/detachable manner, and the work is supported on the treatment solution tank bottom part. A work sealing means and a first electrode are provided on the treatment solution tank side part. Since a first electrode is pressed with an electrode pressing means independently from the attachment/detachment of the treatment solution tank side part to/from the treatment solution tank bottom part, the pressure necessary for the sealing of the work and the conduction with the first electrode respectively can be adequately and easily controlled.
申请公布号 JP2003055797(A) 申请公布日期 2003.02.26
申请号 JP20010242190 申请日期 2001.08.09
申请人 TOKYO ELECTRON LTD 发明人 YAGI YASUSHI;AOKI KAZUJI;USHIJIMA MITSURU
分类号 C25D17/00;C25D21/00;H01L21/02;(IPC1-7):C25D17/00 主分类号 C25D17/00
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