发明名称 |
SOLUTION TREATMENT DEVICE, AND SOLUTION TREATMENT METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a solution treatment device capable of pressing an electrode and a sealing means against a work with the pressure suitable for the electric conduction and the sealing. SOLUTION: A treatment solution tank comprises a treatment solution tank side part and a treatment solution tank bottom part which are connected to each other in an attachable/detachable manner, and the work is supported on the treatment solution tank bottom part. A work sealing means and a first electrode are provided on the treatment solution tank side part. Since a first electrode is pressed with an electrode pressing means independently from the attachment/detachment of the treatment solution tank side part to/from the treatment solution tank bottom part, the pressure necessary for the sealing of the work and the conduction with the first electrode respectively can be adequately and easily controlled.
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申请公布号 |
JP2003055797(A) |
申请公布日期 |
2003.02.26 |
申请号 |
JP20010242190 |
申请日期 |
2001.08.09 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
YAGI YASUSHI;AOKI KAZUJI;USHIJIMA MITSURU |
分类号 |
C25D17/00;C25D21/00;H01L21/02;(IPC1-7):C25D17/00 |
主分类号 |
C25D17/00 |
代理机构 |
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代理人 |
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地址 |
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