REACTION APPARATUS FOR PRODUCING SILICON

摘要

PROBLEM TO BE SOLVED: To provide a high purity silicon producing apparatus capable of continuous operation. SOLUTION: In the reaction apparatus for producing silicon by the reaction of chlorosilanes with hydrogen and recovering a part of or the whole produced silicon through a silicon molten liquid, the inside surface of the apparatus in contact with the silicon molten liquid is made of pyrolytic carbon or boron nitride.