| 摘要 |
PROBLEM TO BE SOLVED: To provide an electro-optical device, an electronic apparatus, and a method for manufacturing the electro-optical device in which a high-quality image display is realized by preventing abnormal exposures during formation of a photosensitive resin layer on a transparent substrate by using photolithography. SOLUTION: A TFT-arrayed substrate 10 of a reflective or transreflective electro-optical device 100 is manufactured by applying a photosensitive resin 13, then by exposing the resin 13 from the front face side of the TFT-arrayed substrate in the state where the rear side face side of the TFT-arrayed substrate 10 is held by a vacuum chuck 500. In this case, since a light shielding film 1g is formed at the lower side of a photosensitive resin layer 12, a risk that light transmitted through the TFT-arrayed substrate 10 is reflected by the vacuum chuck 500 and thereby transfers marks and the like of suction holes 501, etc., to the photosensitive resin 13 can be avoided. |
