METHOD FOR PRODUCING HEXAFLUOROETHANE AND USE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide both a method for industrially and advantageously producing a high-purity hexafluorothane usable as an etching gas or a cleaning gas and the use thereof. SOLUTION: This method for producing the hexafluoroethane comprises (1) a step of reacting pentafluoroethane containing a chlorine-containing compound having 1-3 carbon atoms with hydrogen in the presence of a hydrogenating catalyst in the vapor phase at 150-400 deg.C and hydrogenating the chlorine- containing compound and (2) reacting the resultant product in the step (1) with fluorine in the presence of a diluting gas in the vapor phase and producing the hexafluoroethane.