| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning capacitance microscope(SCM) with which a p-n junction position in a semiconductor sample can be specified with high detection sensitivity and to provide a measuring method using the SCM. SOLUTION: An AC voltage is applied across a conductive probe and the sample from an AC voltage application circuit 3a, a capacitance signal which is modulated by it is acquired by a capacitance sensor 4, and a second-order differential (d<2> C/dV<2> ) signal regarding the applied voltage is detected. For example, when the angular frequency of the applied AC voltage isω, by detecting a component which is changed by an angular frequency 2ωfrom among the capacitance signal with a lock-in amplifier (LCD) 17 and finding a position whose value takes an extreme value, the p-n junction position can be specified with high sensitivity and with high accuracy.
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