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发明名称
A method for processing a semiconductor crystal ingot
摘要
申请公布号
EP0776031(B1)
申请公布日期
2003.02.26
申请号
EP19960308435
申请日期
1996.11.21
申请人
AIR WATER INC.
发明人
YOSHINO, AKIRA;YOKOYAMA, TAKASHI;OHMORI, YOSHINORI;YAMAMOTO, KAZUMA
分类号
H01L21/3065;(IPC1-7):H01L21/306;B26F3/00
主分类号
H01L21/3065
代理机构
代理人
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