| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit tester and its self- diagnosis method which enable self diagnosis, without the removal of an object to be tested, even in the middle of a test. SOLUTION: This tester is provided with tester pins 11a-11d for supplying a testing signal to a DUT(Device Under Test) 30, and receiving signals obtained from the DUT 30, a DC-testing circuit 18 for applying a DC-testing signal for carrying out a DC test of the DUT 30 or diagnosis of the tester pins 11a-11d, and switches 12a-12d, 13a-13d, 14a-14d for connecting the test circuit 18 with the DUT 30 or tester pins 11a-11d in an alternative manner.
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