| 摘要 |
PROBLEM TO BE SOLVED: To provide a Fabry-Perot filter which does not cause a warpage to a movable reflector, but widens an optical activity region and easily controls the inclination of the movable reflector. SOLUTION: The Fabry-Perot filter which has a horizon glass and the movable reflector oppositely disposed and spaced by a size variable gap to the horizon glass, and selects and transmits the light of an arbitrarily desired wavelength corresponding to the gap, is provided with a fixed substrate on which the horizon glass is formed, the movable substrate connected to the fixed substrate through a spacer, a diaphragm which has conductivity and whose surface not opposed to the fixed substrate of the movable substrate is etched in a rectangular groove and is formed thin, a projecting part which is formed thick at a position surrounded by the diaphragm of the movable substrate and in which the movable reflector is formed, and a fixed electrode which is formed on the horizon glass and oppositely disposed to the diaphragm. The movable substrate is driven by electrostatic force generated by applying a driving voltage between the fixed electrode and the diaphragm so as to vary the gap. |
