发明名称 |
METHOD OF MANUFACTURING IN-PLANE LATTICE CONSTANT CONTROL SUBSTRATE AND IN-PLANE LATTICE CONSTANT CONTROL SUBSTRATE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of controlling the in-plane lattice constant of a substrate and an in-plane lattice constant control substrate. SOLUTION: A first epitaxial thin film 2 comprising a first material is formed on a substrate 1 at a first predetermined temperature, and then a second epitaxial thin film 6 comprising a second material containing the first material and another material capable of forming a solid solution with the first material in a predetermined component ratio is formed on the first epitaxial thin film 2, and further heat treatment is carried out at a second predetermined temperature. By the heat treatment at the second predetermined temperature, dislocations 4 are introduced and the lattice constant of the second epitaxial thin film 6 is alleviated to a value close to the lattice constant of a bulk crystal of the second material. A desired in-plane lattice constant can be realized by selecting the component ratio of another material in the second material.
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申请公布号 |
JP2003055100(A) |
申请公布日期 |
2003.02.26 |
申请号 |
JP20010250842 |
申请日期 |
2001.08.21 |
申请人 |
JAPAN SCIENCE & TECHNOLOGY CORP |
发明人 |
KOINUMA HIDEOMI;KAWASAKI MASASHI;FUKUMURA TOMOAKI;TERAI KOTA |
分类号 |
C30B33/02;C30B25/18;C30B29/32;C30B33/00;(IPC1-7):C30B33/02 |
主分类号 |
C30B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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