| 摘要 |
PROBLEM TO BE SOLVED: To highly precisely apply a prescribed pressure to an article by a piston rod which is driven by a fluid pressure. SOLUTION: A piston 14 is incorporated axially reciprocatingly in a cylinder body 13, and a piston rod 22 is axially movably installed in the piston 14 to be within the range of a prescribed stroke S. A diaphragm 25 for partitioning and forming a diaphragm pressure chamber 34 is incorporated between the piston rod 22 and the piston 14. The piston 14 is provided with a main piston 14a, penetrating through the piston rod 22 and a sub-piston 14a attached to the main piston 14a and a communication hole 33 communicating a pressure chamber 31 for advancing and the diaphragm pressure chamber 34 is formed in the sub-piston 14b. When the piston rod 22 pressurizes a body W, the pushing force is set according to the pressure applied to the diaphragm 25.
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