| 摘要 |
PURPOSE: To prevent the open air from creeping into a substrate housing container when the door of the substrate housing container is opened, and to restrain a foreign substance from adhering to a substrate housed at the inside of the substrate housing container. CONSTITUTION: In the wafer transfer method for the substrate, the substrate housing container in which the substrate is housed so as to be sealed with the door is placed on the loading port apparatus provided at a substrate treatment apparatus, the door of the loading port apparatus and the door of the substrate housing container are faced so as to be docked, the door of the substrate housing container is opened, and the substrate housed at the inside is transferred into the substrate treatment apparatus. Before the door is opened, the inside of the substrate housing container is pressurized.
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