ELECTRON BEAM PROJECTION REACTION DEVICE,申请号EP20000900161-传众专利搜索

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发明名称	ELECTRON BEAM PROJECTION REACTION DEVICE
摘要
申请公布号	EP1160799(A4)	申请公布日期	2003.02.26
申请号	EP20000900161	申请日期	2000.01.11
申请人	EBARA CORPORATION	发明人	DOI, YOSHITAKA;NOMOTO, MASAO;HAYASHI, KAZUAKI;IZUTSU, MASAHIRO;KAGEYAMA, YOSHIHARU;OKAMOTO, KYOICHI
分类号	B01D53/32;B01D53/60;G21K5/04;(IPC1-7):G21K5/00;B01D53/00;B01J19/08	主分类号	B01D53/32
代理机构		代理人
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