Lithographic apparatus and device manufacturing method

摘要

A Lorentz actuator for providing a force between a first part and a second part of the apparatus, comprising a main magnet system, attached to a first part of the apparatus and providing a first magnetic field; a subsidiary magnet system, attached to said first part and arranged in a Halbach configuration, providing a second magnetic field; and an electrically conductive element attached to a second part of the apparatus and arranged so as to produce a force between said first and second parts of the apparatus by interaction of an electric current carried by said electrically conductive element and the combination of the first and second magnetic fields. <IMAGE>