发明名称 SEMICONDUCTOR TESTER AND INK MARK FORMING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor tester which prevents ink marks made by an inker on a semiconductor chip discriminated as being defective from being scattered or flowing over to other semiconductor chips, and prevents discrimination between defective semiconductor chips and nondefective ones from becoming difficult. SOLUTION: A cover 4, having elasticity or flexibility, is fitted to the tip of an inker 3. This cover 4 is pushed against a semiconductor chip 2 discriminated to be defective to separate it from those being in its periphery, and ink is jetted from the inker 3, and an ink mark 7a is formed. After that, drying air is blown out from an air-feed inlet 5 into the cover 4, and the mark is dried swiftly.
申请公布号 JP2003057294(A) 申请公布日期 2003.02.26
申请号 JP20010246494 申请日期 2001.08.15
申请人 NEC ENG LTD 发明人 TAGA YOICHIRO
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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