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发明名称
Process for making semiconductor devices
摘要
申请公布号
US3075892(A)
申请公布日期
1963.01.29
申请号
US19590840045
申请日期
1959.09.15
申请人
WESTINGHOUSE ELECTRIC CORPORATION
发明人
JOHN HAROLD F.;JR. JOHN W. FAUST,
分类号
C23C18/16;C23C18/18;C25D5/34;C25D7/12;H01L21/00;H01L21/288
主分类号
C23C18/16
代理机构
代理人
主权项
地址
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