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发明名称
摘要
申请公布号	JP2003507890(A)	申请公布日期	2003.02.25
申请号	JP20010517433	申请日期	2000.07.08
申请人		发明人
分类号	H01L21/329;H01L29/861;(IPC1-7):H01L21/329	主分类号	H01L21/329
代理机构		代理人
主权项
地址

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