APPARATUS FOR MONITORING BOARD FAIL OF STEPPER USING SEMICONDUCTOR MANUFACTURE DEVICE

摘要

PURPOSE: An apparatus for monitoring board fail of stepper using a semiconductor manufacture device is provided to prevent a process defect by detecting the fail state of a board existing in every module of the stepper. CONSTITUTION: A plurality of modules composed of several boards use the same power. A plurality of ammeters measure and display the current flowing from the plurality of modules. The plurality of ammeters are installed outside an electric rack, connected to the plurality of power input terminals and ground terminals of the modules.