发明名称 Method of manufacture for generation of high purity water vapor
摘要 The present invention increases the safety of a reactor for generating water vapor from oxygen and hydrogen, provides ultra-pure water vapor in an amount necessary for practical use safely, stably and continuously, provides ultra-pure water vapor concentrations to nearly 100 percent without the need of an inert transporting gas, and provides a catalyst with long term, high catalytic activity within the reactor. Specifically, the system comprises a catalyst vessel and a plurality of sorption vessels. The catalyst vessel is made of a heat-resistant material and includes an inlet and an outlet for water vapor and inert gas mixture, a heat source, and has a platinum or palladium catalyst within the catalyst vessel. The sorption vessels are made of a heat-resistant material and includes an inlet and an outlet for water vapor and inert gas mixture, a heat source, and has a molecular sieve water vapor sorption material within the sorption vessel. Hydrogen, oxygen and an inert gas fed from the inlet of the reactor vessel contacts the catalyst to enhance reactivity, thereby producing water from hydrogen and oxygen. The water vapor and inert gas mixture flows from the reactor vessel to the sorption vessel, where the water vapor and inert gas mixture contacts the sorption material. The sorption material sorbs the water vapor from the water vapor and inert gas mixture. The inert gas is exhausted. Then, the water vapor and inert gas mixture flowing from the reactor vessel to the sorption vessel is stopped. Then, the sorption vessel heated to release ultra-pure water vapor. A temperature of the sorption material determines the flowrate of the water vapor from the system.
申请公布号 US6524934(B1) 申请公布日期 2003.02.25
申请号 US19990429224 申请日期 1999.10.28
申请人 LORIMER D'ARCY H. 发明人 LORIMER D'ARCY H.
分类号 B01J12/00;B01J19/00;B01J19/24;C01B5/00;(IPC1-7):H01L21/326 主分类号 B01J12/00
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