| 发明名称 |
BEOL decoupling capacitor |
| 摘要 |
An amorphous dielectric material having a dielectric constant of 10 or greater is provided herein for use in fabricating capacitors in integrated circuit applications. The amorphous dielectric material is formed using temperatures below 450° C.; therefore the BEOL metallurgy is not adversely affected. The amorphous dielectric material of the present invention exhibits good conformality and a low leakage current. Damascene devices containing the capacitor of the present invention are also disclosed.
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| 申请公布号 |
US6525427(B2) |
申请公布日期 |
2003.02.25 |
| 申请号 |
US20020055704 |
申请日期 |
2002.01.22 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DUNCOMBE PETER RICHARD;EDELSTEIN DANIEL CHARLES;LAIBOWITZ ROBERT BENJAMIN;NEUMAYER DEBORAH ANN;NING TAK HUNG;ROSENBERG ROBERT;SHAW THOMAS MCARRAOLL |
| 分类号 |
H01G4/33;H01L21/02;H01L21/316;H01L21/822;H01L23/522;H01L23/532;H01L23/64;H01L27/04;H01L27/105;(IPC1-7):H01L23/48;H01L23/52;H01L29/40 |
主分类号 |
H01G4/33 |
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