发明名称 |
Manual guide vehicle and method for supplying power thereto |
摘要 |
A Manual Guide Vehicle for transporting semiconductor-containers to and from processing equipment is disclosed. The Manual Guide Vehicle is capable of receiving electric power for driving a transporting device for transporting cassettes with semiconductor samples to be processed from the external processing equipment.
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申请公布号 |
US6524057(B1) |
申请公布日期 |
2003.02.25 |
申请号 |
US20000664119 |
申请日期 |
2000.09.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK BYUNG-KWEN |
分类号 |
B60L11/18;H01L21/677;H01R13/631;(IPC1-7):B60L11/08;H02J7/00 |
主分类号 |
B60L11/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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