发明名称 Rayleigh scattering optical flux monitor
摘要 A device for in situ real time monitoring of atomic and molecular fluxes by use Rayleigh scattering. The flux can be generated by an effusion cell during molecular beam epitaxy. The present device uses a coherent light source, such as a helium neon laser, a high precision mirror assembly capable of providing an effective number of reflections though the flux beam and an interferometer detector to track the changes in flux.
申请公布号 US6525820(B1) 申请公布日期 2003.02.25
申请号 US19990474959 申请日期 1999.12.30
申请人 GRADIENT TECHNOLOGY 发明人 OWENS DALE W.
分类号 C30B23/06;G01N21/51;(IPC1-7):G01B9/02 主分类号 C30B23/06
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