发明名称 Surface treatment and protection method for cadmium zinc telluride crystals
摘要 A method for treatment of the surface of a CdZnTe (CZT) crystal that provides a native dielectric coating to reduce surface leakage currents and thereby, improve the resolution of instruments incorporating detectors using CZT crystals. A two step process is disclosed, etching the surface of a CZT crystal with a solution of the conventional bromine/methanol etch treatment, and after attachment of electrical contacts, passivating the CZT crystal surface with a solution of 10 w/o NH4F and 10 w/o H2O2 in water.
申请公布号 US6524966(B1) 申请公布日期 2003.02.25
申请号 US20000536883 申请日期 2000.03.28
申请人 SANDIA NATIONAL LABORATORIES 发明人 WRIGHT GOMEZ W.;JAMES RALPH B.;BURGER ARNOLD;CHINN DOUGLAS A.
分类号 H01L21/465;(IPC1-7):H01L21/302 主分类号 H01L21/465
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